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Enhanced Topographical Characterization of Sharp Step Edges With Simultaneous AFM Imaging and Force Spectroscopy

[+] Author Affiliations
Santiago D. Solares

University of Maryland at College Park, College Park, MD

Paper No. DETC2010-28099, pp. 461-467; 7 pages
doi:10.1115/DETC2010-28099
From:
  • ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems
  • Montreal, Quebec, Canada, August 15–18, 2010
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4412-0 | eISBN: 978-0-7918-3881-5
  • Copyright © 2010 by ASME

abstract

Topographical imaging with atomic force microscopy (AFM) has become an established method since its invention in 1986. However, there exist a variety of imaging artifacts that can distort the acquired images, especially when using sharp probes such as carbon nanotubes or nanowires. This paper briefly discusses common imaging artifacts occurring at sharp step edges and explores theoretically their mitigation with spectral and multi-frequency methods that can perform simultaneous topographical imaging and force spectroscopy. The work focuses on the spectral inversion method, which has been experimentally validated by others [Stark et al., Proc. Natl. Acad. Sci. USA 99, 8473–8478 (2002); Sahin et al., Nature Nanotech. 2, 507–514 (2007)], and on a recently proposed dual-frequency-modulation method, which has been demonstrated within computational simulations and is under experimental implementation in our laboratory [Solares & Chawla, Meas. Sci. & Technol. 19, No. 055502; Chawla & Solares, Meas. Sci. & Technol. 20, No. 015501].

Copyright © 2010 by ASME

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