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On MEMS/NEMS Biosensor Sensitivity Near Half Natural Frequency

[+] Author Affiliations
Dumitru I. Caruntu, Martin Knecht

University of Texas Pan American, Edinburg, TX

Paper No. DETC2010-28612, pp. 439-445; 7 pages
  • ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems
  • Montreal, Quebec, Canada, August 15–18, 2010
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4412-0 | eISBN: 978-0-7918-3881-5
  • Copyright © 2010 by ASME


This paper deals with sensitivity of electrostatically actuated Bio-MEMS/NEMS resonator sensors near half natural frequency for mass detection for applications in medicine and biology. Electrostatic force along with fringe correction and Casimir effect are included in the model. They introduce parametric nonlinear terms in the system. The partial-differential equation of motion of the system is solved by using the method of multiple scales. A direct approach of the problem is then used. Two approximation problems resulting from the direct approach are solved. The phase-amplitude relationship is obtained. Numerical results for uniform electrostatically actuated micro resonator sensors are provided. An additional mass consisting of a film with a thickness of 100 nm (virus size), and a density of 0.43 of the density of the microsensor, has been added to the sensor. The additional mass shifted the amplitude-frequency curve of the sensor to lower frequencies.

Copyright © 2010 by ASME



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