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An Enhanced Stability Model for Electrostatic Comb-Drive Actuator Design

[+] Author Affiliations
Tristan T. Trutna, Shorya Awtar

University of Michigan, Ann Arbor, MI

Paper No. DETC2010-28943, pp. 597-605; 9 pages
doi:10.1115/DETC2010-28943
From:
  • ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 2: 34th Annual Mechanisms and Robotics Conference, Parts A and B
  • Montreal, Quebec, Canada, August 15–18, 2010
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4410-6 | eISBN: 978-0-7918-3881-5
  • Copyright © 2010 by ASME

abstract

This paper presents a stability model for predicting the snap-in behavior of electrostatic comb-drive actuators, while taking into account the bearing direction stiffness and error motion of the associated flexure suspension. Error motions typically arise from the flexure suspension kinematics or manufacturing variations. The presented model allows for a more accurate determination of the comb-drive actuator’s motion range, limited by snap-in instability, as well as robustness against this instability over the motion range. Ultimately, this model is used as an effective design tool to help evaluate several existing and new flexure suspension geometries for range and robustness.

Copyright © 2010 by ASME
Topics: Stability , Actuators , Design

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