Full Content is available to subscribers

Subscribe/Learn More  >

An Enhanced Stability Model for Electrostatic Comb-Drive Actuator Design

[+] Author Affiliations
Tristan T. Trutna, Shorya Awtar

University of Michigan, Ann Arbor, MI

Paper No. DETC2010-28943, pp. 597-605; 9 pages
  • ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 2: 34th Annual Mechanisms and Robotics Conference, Parts A and B
  • Montreal, Quebec, Canada, August 15–18, 2010
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4410-6 | eISBN: 978-0-7918-3881-5
  • Copyright © 2010 by ASME


This paper presents a stability model for predicting the snap-in behavior of electrostatic comb-drive actuators, while taking into account the bearing direction stiffness and error motion of the associated flexure suspension. Error motions typically arise from the flexure suspension kinematics or manufacturing variations. The presented model allows for a more accurate determination of the comb-drive actuator’s motion range, limited by snap-in instability, as well as robustness against this instability over the motion range. Ultimately, this model is used as an effective design tool to help evaluate several existing and new flexure suspension geometries for range and robustness.

Copyright © 2010 by ASME
Topics: Stability , Actuators , Design



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In