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Characterzation and Quality Control for Micro- and Nanochanneled Silicon Membranes

[+] Author Affiliations
Jaskaran Singh Gill, Alessandro Grattoni, Arturas Ziemys

The University of Texas Health Science Center, Houston, TX

Mauro Ferrari

The University of Texas Health Science Center; Rice University, Houston, TX

Paper No. NEMB2010-13297, pp. 139-141; 3 pages
doi:10.1115/NEMB2010-13297
From:
  • ASME 2010 First Global Congress on NanoEngineering for Medicine and Biology
  • ASME 2010 First Global Congress on NanoEngineering for Medicine and Biology
  • Houston, Texas, USA, February 7–10, 2010
  • Conference Sponsors: ASME Nanotechnology Council
  • ISBN: 978-0-7918-4392-5 | eISBN: 978-0-7918-3866-2
  • Copyright © 2010 by ASME

abstract

The rapid advancement of silicon fabrication techniques has enabled the production of large numbers of precisely designed devices. Such devices are appealing to a wide range of industries and have already seen use in energy conversion [1] and medical applications [2]. Our group’s interest is in the latter; specifically the use of micro- and nanofabricated channels in silicon for the controlled release of drugs.

Copyright © 2010 by ASME

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