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Nonlinear Parametric Resonance for NEMS and MEMS Biosensor Applications

[+] Author Affiliations
Dumitru I. Caruntu, Martin W. Knecht

University of Texas Pan American, Edinburg, TX

Paper No. NEMB2010-13238, pp. 47-48; 2 pages
  • ASME 2010 First Global Congress on NanoEngineering for Medicine and Biology
  • ASME 2010 First Global Congress on NanoEngineering for Medicine and Biology
  • Houston, Texas, USA, February 7–10, 2010
  • Conference Sponsors: ASME Nanotechnology Council
  • ISBN: 978-0-7918-4392-5 | eISBN: 978-0-7918-3866-2
  • Copyright © 2010 by ASME


This paper deals with electrostatically actuated resonator micro- and nano-sensor for mass detection for applications in medicine and biology. Nonlinear parametric resonance of the sensor when the electrostatic actuation frequency is near natural frequency of the system is investigated. Mass deposition is included and its effect on the nonlinear behavior of the resonator is predicted.

Copyright © 2010 by ASME



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