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Self Thermal Elimination of Nanomechanics-Based Biosensor Using a Single Free-Standing Piezoresistive Microcantilever

[+] Author Affiliations
Yu-Fu Ku, Yi-Kuang Yen, Ping-Yen Lin, Long-Sun Huang

National Taiwan University, Taipei, Taiwan

Paper No. NEMB2010-13142, pp. 25-26; 2 pages
  • ASME 2010 First Global Congress on NanoEngineering for Medicine and Biology
  • ASME 2010 First Global Congress on NanoEngineering for Medicine and Biology
  • Houston, Texas, USA, February 7–10, 2010
  • Conference Sponsors: ASME Nanotechnology Council
  • ISBN: 978-0-7918-4392-5 | eISBN: 978-0-7918-3866-2
  • Copyright © 2010 by ASME


A compact piezoresistive microcantilever platform integrated by MEMS technique provides a convenient and reliable approach for biochemical detection. In contrast to the conventional double free-standing piezoresistive cantilever beams of heterogeneous sensing surfaces, a single free-standing piezoresistive microcantilever sensor was first proposed with the elimination of interference of chemical effect. The single beam piezoresistive sensor which is temperature-sensitive was well controlled within ±0.2°C by introducing the novel method of self elimination of thermal effect. This new approach maintains device compactness with no additional use of bulky temperature-controlled apparatus, and significantly reduces noises of temperature coefficient of resistance (TCR) and bimorph effect. The C-reactive protein (CRP) detection of the microcantilever biosensor with self elimination of thermal effect was verified with the concentration of 100 μg/mL in a room-temperature environment.

Copyright © 2010 by ASME
Topics: Biosensors



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