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In-Situ Vapor Phase Lubrication of MEMS Devices

[+] Author Affiliations
Seong H. Kim

Pennsylvania State University, University Park, PA

Paper No. IJTC2007-44418, pp. 883-884; 2 pages
doi:10.1115/IJTC2007-44418
From:
  • ASME/STLE 2007 International Joint Tribology Conference
  • ASME/STLE 2007 International Joint Tribology Conference, Parts A and B
  • San Diego, California, USA, October 22–24, 2007
  • Conference Sponsors: Tribology Division
  • ISBN: 0-7918-4810-8 | eISBN: 0-7918-3811-0
  • Copyright © 2007 by ASME

abstract

The basic principles, potentials, and challenges of the in-situ vapor phase lubrication will be addressed in the MEMS panel discussion.

Copyright © 2007 by ASME

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