Full Content is available to subscribers

Subscribe/Learn More  >

Rolling Friction in MEMS Ball Bearings: The Effects of Loading and Solid Film Lubrication

[+] Author Affiliations
M. McCarthy, B. Hanrahan, R. Ghodssi

University of Maryland, College Park, MD

C. Zorman

Case Western Reserve University, Cleveland, OH

Paper No. IJTC2007-44190, pp. 827-829; 3 pages
  • ASME/STLE 2007 International Joint Tribology Conference
  • ASME/STLE 2007 International Joint Tribology Conference, Parts A and B
  • San Diego, California, USA, October 22–24, 2007
  • Conference Sponsors: Tribology Division
  • ISBN: 0-7918-4810-8 | eISBN: 0-7918-3811-0
  • Copyright © 2007 by ASME


The effects of loading and solid film lubrication on rolling friction in MEMS-fabricated ball bearing structures are investigated in this paper. An in-situ non-contact experimental procedure was used to measure the frictional forces transmitted through a linear ball bearing system. The test devices consist of two silicon plates with deep-etched rectangular trenches acting as the housing for 285μm diameter steel microballs. The dynamic friction is measured with respect to relative velocity for several normal loads and it is observed that the frictional force increases linearly with microball contact area. Additionally, test structures with a 1μm silicon carbide (SiC) film deposited in the trenches have been tested. A 70% reduction in rolling resistance is shown between the nonlubricated and the SiC-lubricated test structures under identical experimental conditions. This is attributed to the reduced sliding friction in the SiC-steel contact area during interfacial slipping. To the best of our knowledge this is the first reported characterization of dynamic rolling friction in a MEMS device using a solid film lubricant. It is assumed that all frictional forces measured in this work are due to the desired rolling motion as well as bulk sliding of the microballs.

Copyright © 2007 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In