Full Content is available to subscribers

Subscribe/Learn More  >

Miniaturization of Electrostatic Fluid Accelerators

[+] Author Affiliations
C. P. Hsu, N. E. Jewell-Larsen, A. C. Rollins, A. V. Mamishev

University of Washington

I. A. Krichtafovitch

Kronos Air Technologies

S. W. Montgomery, J. T. Dibene, II

Intel Corporation

Paper No. IMECE2006-13990, pp. 165-170; 6 pages
  • ASME 2006 International Mechanical Engineering Congress and Exposition
  • Heat Transfer, Volume 3
  • Chicago, Illinois, USA, November 5 – 10, 2006
  • Conference Sponsors: Heat Transfer Division
  • ISBN: 0-7918-4786-1 | eISBN: 0-7918-3790-4
  • Copyright © 2006 by ASME


Existing thermal management methods for electronics do not meet technology needs and remain a major bottleneck in the evolution of computing, sensing, and information technology. The decreasing size of microelectronics components and the resulting increasing thermal output density require novel cooling solutions. Electrohydrodynamic ionic wind pumps, also known as electrostatic fluid accelerators (EFA), have the potential of becoming a critical element of electronic thermal management solutions. In order to take full advantage of EFA-based thermal management, it is essential to miniaturize EFA technology. This paper demonstrates the successful operation of a meso-scale microfabricated silicon EFA. A cantilever structure fabricated in bulk silicon with a radius of tip curvature of 25 μm is used as the corona electrode. The device was fabricated using a Deep Reactive Ion Etching (DRIE) microfabrication process. Forced convection cooling is demonstrated using infrared imaging, showing a 25°C surface temperature reduction over an actively heated substrate. The fabrication and test results of a meso-scale microfabricated EFA are presented in this paper.

Copyright © 2006 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In