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Fabrication of Optical Microlenses in Glass Using a Femtosecond Laser for LBA-on-a-Chip Applications

[+] Author Affiliations
Y. Cheng, H. L. Tsai

University of Missouri at Rolla

Paper No. IMECE2006-15622, pp. 657-660; 4 pages
doi:10.1115/IMECE2006-15622
From:
  • ASME 2006 International Mechanical Engineering Congress and Exposition
  • Heat Transfer, Volume 2
  • Chicago, Illinois, USA, November 5 – 10, 2006
  • Conference Sponsors: Heat Transfer Division
  • ISBN: 0-7918-4785-3 | eISBN: 0-7918-3790-4
  • Copyright © 2006 by ASME

abstract

We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing great potential of using these microoptical lenses in lab-on-a-chip applications.

Copyright © 2006 by ASME
Topics: Lasers , Glass , Manufacturing

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