0

Full Content is available to subscribers

Subscribe/Learn More  >

Characterization of Silicon Oxide-Based Materials in an Atomic Force Microscope

[+] Author Affiliations
Marissa J. Post, J. Liu, J. Du, S. R. Schmid, T. Ovaert

University of Notre Dame

M. Laurent

Tribology Consultant

Paper No. IMECE2006-15636, pp. 161-165; 5 pages
doi:10.1115/IMECE2006-15636
From:
  • ASME 2006 International Mechanical Engineering Congress and Exposition
  • Tribology
  • Chicago, Illinois, USA, November 5 – 10, 2006
  • Conference Sponsors: Tribology Division
  • ISBN: 0-7918-4782-9 | eISBN: 0-7918-3790-4
  • Copyright © 2006 by ASME

abstract

Silicon oxides are widespread in microelectronics and microelectromechanical systems (MEMS) applications. One form of this material that has been suggested as a dielectric in MEMS applications is a carbon-doped form of silicon oxide that can be produced in thin coatings. However, the mechanical properties and wear resistance of these coatings is unknown, and coatings of interest are difficult to characterize because they are very thin. A test methodology has been previously described using extremely sharp diamond tips on a stainless steel cantilever in an atomic force microscope, and this method allows direct calculation of an effective material flow strength at penetration depths as small as twenty nanometers. A number of forms of carbon-doped and undoped silicon dioxide have been evaluated using this methodology. Size effects on material properties are evaluated, and correlations between test methods are presented.

Copyright © 2006 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In