0

Full Content is available to subscribers

Subscribe/Learn More  >

Mechanical Properties of CrN Films Deposited by Magnetron Sputtering Method

[+] Author Affiliations
A. H. Jayatissa, D. Wagner, S. Sorin

University of Toledo

N. X. Randall

CSM Instruments

Paper No. IMECE2006-15208, pp. 135-138; 4 pages
doi:10.1115/IMECE2006-15208
From:
  • ASME 2006 International Mechanical Engineering Congress and Exposition
  • Tribology
  • Chicago, Illinois, USA, November 5 – 10, 2006
  • Conference Sponsors: Tribology Division
  • ISBN: 0-7918-4782-9 | eISBN: 0-7918-3790-4
  • Copyright © 2006 by ASME

abstract

The mechanical properties of CrN films coated by radio frequency (rf) magnetron sputtering method were investigated. CrN films were coated on stainless steel, silicon wafer and glass substrates using sputtering of a Cr target in nitrogen ambient. The films were coated by varying the deposition temperature, nitrogen partial pressure and rf power density. The films coated were characterized by nanoindentation method, microhardness, optical, and corrosion tests. In order to use CrN as mechanical coating material, the surface roughness, hardness and adhesion properties have to be determined. The film properties were measured using atomic force microscopy and nanoindentation method and analyzed as a function of deposition conditions. It was found that these properties can be varied by changing the deposition conditions.

Copyright © 2006 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In