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Automated Synthesis of MEMS Fabrication Sequences Using Graph Grammars

[+] Author Affiliations
Saneet A. Jawalkar, Matthew I. Campbell

University of Texas at Austin, Austin, TX

Paper No. DETC2007-34691, pp. 421-431; 11 pages
  • ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 6: 33rd Design Automation Conference, Parts A and B
  • Las Vegas, Nevada, USA, September 4–7, 2007
  • Conference Sponsors: Design Engineering Division and Computers and Information in Engineering Division
  • ISBN: 0-7918-4807-8 | eISBN: 0-7918-3806-4
  • Copyright © 2007 by ASME


The design of any MEMS component is subject to stringent manufacturing constraints. The knowledge about these constraints seems to be available to designers who have experienced the details of MEMS fabrication. In this paper, we put forth the idea of automatically generating a fabrication sequence for surface micro-machined MEMS components using the knowledge stored in grammar rules. As an analogy to CAD tools used in mechanical systems, we envision creating a tool which has the Pro-Engineer approach of determining fabrication sequences for a machine tool based on the final part shape. This tool could be an integral addition to the current MEMS design software so that the designers can freely draft devices and then allow an automated process to determine the fabrication sequence. In this paper we give a brief introduction about the graph grammars. Data from already designed MEMS components is extracted in the form of rules to create an expert system. We have also included an example of generation of the fabrication sequence for several MEMS components.

Copyright © 2007 by ASME



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