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A Thin-Film Piezoelectric Microactuator Optically Powered via an Integrated Micro-Solar Cell

[+] Author Affiliations
Mandar Deshpande, Laxman Saggere

University of Illinois at Chicago

Paper No. IMECE2006-14625, pp. 41-46; 6 pages
  • ASME 2006 International Mechanical Engineering Congress and Exposition
  • Design Engineering and Computers and Information in Engineering, Parts A and B
  • Chicago, Illinois, USA, November 5 – 10, 2006
  • Conference Sponsors: Design Engineering Division and Computers and Information in Engineering Division
  • ISBN: 0-7918-4767-5 | eISBN: 0-7918-3790-4
  • Copyright © 2006 by ASME


A novel optically powered microactuator is developed via the integration of a thin film piezoelectric microactuator with a micro-solar cell on the same chip. The integrated microactuator has an overall area of 2×2 mm2 and is less than 0.25 mm in thickness. The paper presents the details of fabrication and preliminary experimental results confirming the optical actuation. The solar cell is fabricated by doping a n-type dopant in a p-type silicon wafer. The thin film piezoelectric microactuator is fabricated alongside the solar cell via the solgel method. The microactuator prototypes are tested for optical actuation under low light intensities in the range 0.1-1.26 W/m2 , and corresponding center point displacements of the actuators and the photovoltages output by the solar cells are measured. An unpoled microactuator prototype produced a maximum displacement of 31 nm corresponding to an input light intensity 1.26 W/m2 .

Copyright © 2006 by ASME



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