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Fluid Manipulation by Bio-Mimetic Cilia

[+] Author Affiliations
Kieseok Oh, Jae-Hyun Chung, Santosh Devasia, James J. Riley

University of Washington, Seattle, WA

Paper No. IMECE2007-42376, pp. 41-45; 5 pages
  • ASME 2007 International Mechanical Engineering Congress and Exposition
  • Volume 2: Biomedical and Biotechnology Engineering
  • Seattle, Washington, USA, November 11–15, 2007
  • Conference Sponsors: ASME
  • ISBN: 0-7918-4296-7 | eISBN: 0-7918-3812-9
  • Copyright © 2007 by ASME


This paper describes the fabrication and actuation of bio-mimetic cilia for fluid manipulation. High aspect ratio cilia made of polydimethylsiloxane (PDMS) were successfully assembled in a microfluidic device by our novel fabrication method. This method was to release the PDMS cilia from a Si mold and assemble the cilia in a device. All the process was performed under water in order to avoid the stiction and pairing of the PDMS cilia. The underwater assembly method enabled a high aspect ratio PDMS structure assembly in a fluidic device. The PDMS cilia were actuated in air and water by lead-zirconate-titanate (PZT) microstage. In the fabricated device, the maximum displacement of the cilia was observed at 120Hz in air and at 50Hz in de-ionized (DI) water with our experimental condition. The actuated cilia in a solution produced convective and propulsive fluid flow near the cilia structure. The developed device can be used for precise handling of small volume sample (e.g., 1 μL).

Copyright © 2007 by ASME
Topics: Fluids , Biomimetics



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