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A Miniature Linear Slide With Air Bearings and Its Implementation in a Mesoscale Precision Turning Machine

[+] Author Affiliations
Seung-Kook Ro, Byung-Sub Kim, Jong-Kweon Park

Korea Institute of Machinery & Materials, Daejeon, South Korea

Paper No. MSEC2007-31097, pp. 771-778; 8 pages
  • ASME 2007 International Manufacturing Science and Engineering Conference
  • ASME 2007 International Manufacturing Science and Engineering Conference
  • Atlanta, Georgia, USA, October 15–18, 2007
  • Conference Sponsors: Manufacturing Division
  • ISBN: 0-7918-4290-8 | eISBN: 0-7918-3809-9
  • Copyright © 2007 by ASME


In this paper, we propose a new miniature air-bearing stage with a moving-magnet slotless linear motor. This stage was developed to achieve the precise positioning required for submicron-level machining and miniaturization by introducing air bearings and a linear motor sufficient for mesoscale precision machine tools. The linear motor contained two permanent magnets and was designed to generate a preload force for the vertical air bearings and a thrust force for the stage movement. The characteristics of the air bearings, which used porous pads, were analyzed with numerical methods, and a magnetic circuit model was derived for the linear motor to calculate the required preload and thrust forces. A prototype of a single-axis miniature stage with dimensions of 120 × 120 × 50 mm3 was designed and fabricated, and its performance was examined, including its vertical stiffness, load capacity, thrust force, and positioning resolution. Two fabricated stages were then used for the X and Z-axes of a mesoscale micro-turning machine combined with an air-bearing spindle to investigate the effectiveness of the proposed system. A mirror surface was machined from an aluminum alloy with a single-crystal diamond tool.

Copyright © 2007 by ASME
Topics: Machinery , Turning , Bearings



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