0

Full Content is available to subscribers

Subscribe/Learn More  >

Laser Heating and Thermally Enhanced Deformation of Silicon

[+] Author Affiliations
Lei Dong

University of North Carolina - Charlotte, Charlotte, NC

John A. Patten

Western Michigan University, Kalamazoo, MI

Paper No. MSEC2007-31014, pp. 305-309; 5 pages
doi:10.1115/MSEC2007-31014
From:
  • ASME 2007 International Manufacturing Science and Engineering Conference
  • ASME 2007 International Manufacturing Science and Engineering Conference
  • Atlanta, Georgia, USA, October 15–18, 2007
  • Conference Sponsors: Manufacturing Division
  • ISBN: 0-7918-4290-8 | eISBN: 0-7918-3809-9
  • Copyright © 2007 by ASME

abstract

A novel hybrid system, using a fiber coupled infrared (IR) laser and through the tool delivery of the beam energy, has been developed for micro laser assisted machining (μ-LAM) of semiconductors and ceramics. This system uses diamond tooling and the laser energy is delivered to the work piece though the cutting tool. The diamond cutting tool and IR fiber laser are directly coupled and integrated into a single package. Of particular significance is that the combination of parameters, i.e. laser wavelength selected for specific materials (such as silicon and silicon carbide), permits heating and thermally softening the chip formation zone, while leaving the balance of the work piece unaffected (thermally). The system is being developed for nano-micro level machining processes, such as practiced with ductile regime machining of semiconductors and ceramics in the field of precision engineering.

Copyright © 2007 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In