Full Content is available to subscribers

Subscribe/Learn More  >

Packaging of an Iron-Gallium Nanowire Acoustic Sensor for Under-Water Applications

[+] Author Affiliations
Rupal Jain, F. Patrick McCluskey, Alison B. Flatau

University of Maryland, College Park, MD

Paper No. IPACK2007-33455, pp. 825-829; 5 pages
  • ASME 2007 InterPACK Conference collocated with the ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference
  • ASME 2007 InterPACK Conference, Volume 2
  • Vancouver, British Columbia, Canada, July 8–12, 2007
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4278-9 | eISBN: 0-7918-3801-3
  • Copyright © 2007 by ASME


The nanoacoustic sensor incorporates cilia-like nanowires made of galfenol, a magnetostrictive material, which responds to incoming acoustic waves by changing the magnetic flux flowing through it which is measured by a GMR sensor. A package developed for this sensor should provide a protective environment for these nanowires, while still allowing the sound waves to reach the sensing element with least attenuation. A MEMS package has been designed analogous to the cochlea in a human-ear for the nanowire acoustic sensor. Package materials have been selected for their acoustic performance in water by conducting several experiments to compare their impedance and attenuation characteristics, moisture absorption, and salt permeation properties. The package filled with silicone oil and encapsulated with polydimethylsiloxane (PDMS) is observed to outperform other packages at all frequencies in minimizing attenuation of the acoustic waves at the interface of the package. The process sequence for fabrication of the nanoacoustic sensor is presented along with the preliminary results.

Copyright © 2007 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In