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Using Risk Analysis to Identify Cost Effective Improvements to a Semiconductor Fabrication Chemical Distribution Facility

[+] Author Affiliations
Fred L. Leverenz, Jr.

Pacific Northwest National Laboratory, Richland, WA

Paper No. IMECE2003-42567, pp. 57-61; 5 pages
doi:10.1115/IMECE2003-42567
From:
  • ASME 2003 International Mechanical Engineering Congress and Exposition
  • Engineering/Technology Management: Safety Engineering and Risk Analysis, Technology and Society, Engineering Business Management, and Homeland Security
  • Washington, DC, USA, November 15–21, 2003
  • Conference Sponsors: Engineering and Technology Management Group
  • ISBN: 0-7918-3728-9 | eISBN: 0-7918-4663-6, 0-7918-4664-4, 0-7918-4665-2
  • Copyright © 2003 by ASME

abstract

In today’s semiconductor industry, the business loss associated with one full day of lost production can have a significant impact on revenues. Key factors affecting overall profitability are unplanned fabrication downtimes and contamination resulting in defective products. It is critical, therefore, to implement effective risk management strategies for the fabrication process to eliminate yield-limiting defects and to improve the overall production. This paper will discuss a study completed for a semiconductor chemical supplier. Battelle applied a methodology based on the Process Event Tree/Hazard and Operability Study (PET-HAZOP) methodology, identifying numerous ways to avoid unnecessary outages and lost production at a specific client’s semiconductor fabrication facility. This methodology uses a systematic approach to identifying risks in a process, and risks are quantified in terms of expected dollars per year. Within the analysis, the importance of individual equipment items in the process is measured with respect to risk. Two risk measures are used in the analysis: Risk Reduction Worth (RRW) and Risk Achievement Worth (RAW). The RRW identifies opportunities for areas of risk reduction and the RAW identifies critical equipment that must be maintained to prevent the overall risk of the system from increasing significantly. Results were provided in a cost-benefit form for the top items on the RRW and RAW lists. For example, replacing existing chemical distribution pumps with completely non-metallic pumps (cost of about $60,000) would result in savings, due to avoidance of possible chemical contamination, of $430,000 per year. This, and other findings, proved that a systematic approach to evaluating risks for the semiconductor front-end process can identify valuable risk reduction alternatives resulting in significant cost savings.

Copyright © 2003 by ASME

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