Full Content is available to subscribers

Subscribe/Learn More  >

Using Risk Analysis to Identify Cost Effective Improvements to a Semiconductor Fabrication Chemical Distribution Facility

[+] Author Affiliations
Fred L. Leverenz, Jr.

Pacific Northwest National Laboratory, Richland, WA

Paper No. IMECE2003-42567, pp. 57-61; 5 pages
  • ASME 2003 International Mechanical Engineering Congress and Exposition
  • Engineering/Technology Management: Safety Engineering and Risk Analysis, Technology and Society, Engineering Business Management, and Homeland Security
  • Washington, DC, USA, November 15–21, 2003
  • Conference Sponsors: Engineering and Technology Management Group
  • ISBN: 0-7918-3728-9 | eISBN: 0-7918-4663-6, 0-7918-4664-4, 0-7918-4665-2
  • Copyright © 2003 by ASME


In today’s semiconductor industry, the business loss associated with one full day of lost production can have a significant impact on revenues. Key factors affecting overall profitability are unplanned fabrication downtimes and contamination resulting in defective products. It is critical, therefore, to implement effective risk management strategies for the fabrication process to eliminate yield-limiting defects and to improve the overall production. This paper will discuss a study completed for a semiconductor chemical supplier. Battelle applied a methodology based on the Process Event Tree/Hazard and Operability Study (PET-HAZOP) methodology, identifying numerous ways to avoid unnecessary outages and lost production at a specific client’s semiconductor fabrication facility. This methodology uses a systematic approach to identifying risks in a process, and risks are quantified in terms of expected dollars per year. Within the analysis, the importance of individual equipment items in the process is measured with respect to risk. Two risk measures are used in the analysis: Risk Reduction Worth (RRW) and Risk Achievement Worth (RAW). The RRW identifies opportunities for areas of risk reduction and the RAW identifies critical equipment that must be maintained to prevent the overall risk of the system from increasing significantly. Results were provided in a cost-benefit form for the top items on the RRW and RAW lists. For example, replacing existing chemical distribution pumps with completely non-metallic pumps (cost of about $60,000) would result in savings, due to avoidance of possible chemical contamination, of $430,000 per year. This, and other findings, proved that a systematic approach to evaluating risks for the semiconductor front-end process can identify valuable risk reduction alternatives resulting in significant cost savings.

Copyright © 2003 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In