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Nondestructive Measurement of C4 BLM Undercut by Scanning Acoustic Microscope

[+] Author Affiliations
Minhua Lu, Carla Bailey, Hsichang Liu, Krystyna Semkow

IBM

Paper No. IPACK2007-33178, pp. 469-472; 4 pages
doi:10.1115/IPACK2007-33178
From:
  • ASME 2007 InterPACK Conference collocated with the ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference
  • ASME 2007 InterPACK Conference, Volume 1
  • Vancouver, British Columbia, Canada, July 8–12, 2007
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4277-0 | eISBN: 0-7918-3801-3
  • Copyright © 2007 by ASME
Abstract

abstract

A non-destructive measurement of ball limiting metallurgy (BLM) undercut is demonstrated by using C-mode scanning acoustic microscopy. The results from CSAM measurements agree well with the optical and cross-section data. The implementation of the method in manufacturing will not only save time and cost on destructive failure analysis such as cross section and chemical un-layering, but also provide a way for monitoring process trend for early detection and correction of process abnormalities.

Copyright © 2007 by ASME

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