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Evaluation of and Inspection Metrology for Lid Attach for Advanced Thermal Packaging Materials

[+] Author Affiliations
Margaret Stern, Bob Melanson, Vadim Gektin

Sun Microsystems, Inc., Santa Clara, CA

Paul Hundt, Carlos Arroyo, Vikas Gupta

Texas Instruments, Inc., Dallas, TX

Kazumi Nakayoshi

Dow Corning, Toray Company, Inc., Midland, MI

Lyndon Larson, Jesus Marin, David McDougall, Dorab Bhagwagar

Dow Corning Corporation, Midland, MI

Paper No. IPACK2007-33629, pp. 309-317; 9 pages
doi:10.1115/IPACK2007-33629
From:
  • ASME 2007 InterPACK Conference collocated with the ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference
  • ASME 2007 InterPACK Conference, Volume 1
  • Vancouver, British Columbia, Canada, July 8–12, 2007
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4277-0 | eISBN: 0-7918-3801-3
  • Copyright © 2007 by ASME

abstract

We have evaluated a new Ag-filled silicone thermal interface material (TIM) for its sensitivity to lid finish and impact on imaging discontinuities in the die/lid (TIM1) layer, in conjunction with two high performance lid materials, as a part of our advanced packaging technology development effort. Thermal and mechanical (shear stress and lid pull) measurements have been carried out on a number of different lid finishes to optimize thermal performance and adhesion at the TIM1/lid interface. This silicone TIM1 is found to be sensitive to the type of Ni-plating and plating bath chemistry. Nondestructive and destructive metrology has been carried out on flip chip (FC) packages using Ag-filled silicone TIM1 and either Cu or AlSiC lids. A number of silicone formulations have been investigated to assess their impact on surface acoustic microscopy (SAM) and X-ray imaging. Nondestructive evaluation (NDE) by real time X-ray and SAM has identified artifacts that make it difficult to unambiguously detect voids and delamination in the TIM1 layer. A “dark ring” or “picture frame” artifact is observed at the die perimeter in acoustic microscope images of packages with the Ag-filled TIM1. Detailed SEM cross-section and thermal mapping analyses on a number of specially constructed FC packages have been correlated with TIM1/lid delamination and voiding observed in SAM and X-ray images. Results of these studies point to changes in the TIM1 modulus during cure and post cure thermal excursions as the cause of the “dark ring” observed in the transmission SAM images rather than delamination at the TIM1/lid or TIM1/die interfaces. However, in the event that delamination is present at the edges it cannot be unambiguously deconvoluted from the “dark ring” artifact in the SAM images.

Copyright © 2007 by ASME

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