0

Full Content is available to subscribers

Subscribe/Learn More  >

Quantitative Characterization of True Leak Rate of Micro to Nanoliter Packages Using a Helium Mass Spectrometer

[+] Author Affiliations
A. Goswami, B. Han

University of Maryland, College Park, MD

Suk-Jin Ham, Byung-Gil Jeong

Samsung Advanced Institute of Technology, Yongin, Gyeonggi, Korea

Paper No. IPACK2007-33716, pp. 59-66; 8 pages
doi:10.1115/IPACK2007-33716
From:
  • ASME 2007 InterPACK Conference collocated with the ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference
  • ASME 2007 InterPACK Conference, Volume 1
  • Vancouver, British Columbia, Canada, July 8–12, 2007
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4277-0 | eISBN: 0-7918-3801-3

abstract

The helium mass spectrometer has been used extensively for qualitative analysis of fine leaks. However, qualitative analysis for the small volumes (typically < 10−3 cc) of MEMS packages can produce erroneous results. In addition, the qualitative use of the helium fine leak test does not allow comparison of two different packages. Nor can the results be correlated with data from accelerated tests such as 85°C/85%RH test. These limitations warrant the development of a method to assess hermeticity quantitatively. This paper proposes a procedure to quantitatively measure the true leak rate of micro to nanoliter packages using the helium mass spectrometer. The proposed method is based on the fact that the profile of the measured leak rate signal depends only on the true leak rate and the volume of the package. Prior knowledge of the volume of the package enables determination of the true leak rate by performing a weighted non-linear regression analysis of the data. The method was implemented to measure the true leak rate of a MEMS RF filter package. The package was tested under three different test conditions yielding three different signal profiles. The method yielded a consistent value for the true leak rate, which verified the robustness of the method. The proposed method provides a true leak rate as a quantitative measure of hermeticity. The accurate true leak rates will help evaluate new bonding materials/processes and package designs fast and effectively.

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In