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MEMS Reliability Assessment Methodology for Aerospace Applications

[+] Author Affiliations
P. Chauveau, P. Blondy, A. Pothier, A. Crunteanu

XLIM Research Institute, Limoges, France

S. Fargeot

EADS ST, Saint Medard en Jalles, France

Paper No. CANEUS2006-11088, pp. 309-313; 5 pages
doi:10.1115/CANEUS2006-11088
From:
  • CANEUS 2006: MNT for Aerospace Applications
  • CANEUS2006: MNT for Aerospace Applications
  • Toulouse, France, August 27–September 1, 2006
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4254-1 | eISBN: 0-7918-3787-4
  • Copyright © 2006 by ASME

abstract

This paper presents a new dynamic and parametric model of a capacitive micro-electromechanical switch electro-statically actuated. It is built of elementary electrical equivalent-circuit blocks constructed of voltage controlled current sources. The model describes the nonlinear mechanical behaviour of the membrane movement, which allows the computation of the bridge capacitance. It can be inserted as a model to perform simulations as parasitic effects on MEMS structures. All switch parameters such as dimensions and material properties are adjustable.

Copyright © 2006 by ASME

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