Full Content is available to subscribers

Subscribe/Learn More  >

MEMS Reliability Assessment Methodology for Aerospace Applications

[+] Author Affiliations
P. Chauveau, P. Blondy, A. Pothier, A. Crunteanu

XLIM Research Institute, Limoges, France

S. Fargeot

EADS ST, Saint Medard en Jalles, France

Paper No. CANEUS2006-11088, pp. 309-313; 5 pages
  • CANEUS 2006: MNT for Aerospace Applications
  • CANEUS2006: MNT for Aerospace Applications
  • Toulouse, France, August 27–September 1, 2006
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4254-1 | eISBN: 0-7918-3787-4
  • Copyright © 2006 by ASME


This paper presents a new dynamic and parametric model of a capacitive micro-electromechanical switch electro-statically actuated. It is built of elementary electrical equivalent-circuit blocks constructed of voltage controlled current sources. The model describes the nonlinear mechanical behaviour of the membrane movement, which allows the computation of the bridge capacitance. It can be inserted as a model to perform simulations as parasitic effects on MEMS structures. All switch parameters such as dimensions and material properties are adjustable.

Copyright © 2006 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In