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MEMS Reliability: Accurate Measurements of Beam Stiffness Using Nanoindentation Techniques

[+] Author Affiliations
Cédric Seguineau, Jérémie Dhennin

NovaMEMS, Tolouse, France

Jean-Michel Desmarres

Centre National d’Etudes Spatiales, Tolouse, France

Xavier Lafontan

NovaMEMS, Ramonville Saint Agne, France

Michel Ignat

LTPCM, INPG, Saint Martin d’Heres, France

Paper No. CANEUS2006-11057, pp. 301-308; 8 pages
doi:10.1115/CANEUS2006-11057
From:
  • CANEUS 2006: MNT for Aerospace Applications
  • CANEUS2006: MNT for Aerospace Applications
  • Toulouse, France, August 27–September 1, 2006
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4254-1 | eISBN: 0-7918-3787-4
  • Copyright © 2006 by ASME

abstract

Bending tests on suspended parts of MicroElectroMechanical System (MEMS) can be achieved thanks to nanoindentation techniques. The paper presents the main difficulties met when performing such a test, and shows how they can be reduced by experimental ways. An application is realized on gold bridges, with a validation of some theoretical assumptions.

Copyright © 2006 by ASME

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