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Hermeticity Assessment of MEMS Micro Packages: Leak Rate Measurements Based on Infrared Spectroscopy

[+] Author Affiliations
David Veyrié

CNES/IXL, Toulouse Cedex, France

Djemel Lellouchi

NovaMEMS, Ramonville St. Agne, France

Jean-Luc Roux, Francis Pressecq

Centre National d’Etudes Spatiales (CNES), Toulouse Cedex, France

Angélique Tetelin, Claude Pellet

Université Bordeaux 1, Talence Cedex, France

Paper No. CANEUS2006-11039, pp. 281-286; 6 pages
doi:10.1115/CANEUS2006-11039
From:
  • CANEUS 2006: MNT for Aerospace Applications
  • CANEUS2006: MNT for Aerospace Applications
  • Toulouse, France, August 27–September 1, 2006
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4254-1 | eISBN: 0-7918-3787-4
  • Copyright © 2006 by ASME

abstract

This paper presents an alternative method for the hermeticity assessment of MEMS micro-packages, and the first experiments performed using this technique. The method consists in monitoring the internal gas pressure of the cavity by Fourier Transform Infra Red (FTIR) spectroscopy. The package’s hermeticity is then deduced from the pressure variations. In order to carry out the IR transmission measurements, nitrous oxide was chosen as bombing gas due to its excellent absorption properties for mid-IR radiations. The method was applied to BCB-sealed silicon micro-packages and allowed to study the influence of different parameters like the sealing ring dimensions or the internal volume on their hermeticity. Additional measurements were carried out on hermetic packages, with an additional organic coating. These experiments validated the method for micro-packages with a volume of 5 mm3 or more.

Copyright © 2006 by ASME

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