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Environmental Chamber for Temperature and Pressure Investigations on MEMS Devices

[+] Author Affiliations
Djemel Lellouchi, Petra Schmitt, Jérémie Dhennin

NovaMEMS, Toulouse Cedex, France

Jean-Luc Gauffier

INSA Toulouse, Toulouse Cedex, France

Xavier Lafontan

NovaMEMS, Ramonville Saint Agne, France

Patrick Pons

LAAS-CNRS, Toulouse, France

Francis Pressecq

CNES, Toulouse Cedex, France

Paper No. CANEUS2006-11026, pp. 275-279; 5 pages
  • CANEUS 2006: MNT for Aerospace Applications
  • CANEUS2006: MNT for Aerospace Applications
  • Toulouse, France, August 27–September 1, 2006
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4254-1 | eISBN: 0-7918-3787-4
  • Copyright © 2006 by ASME


In this paper, we present a new tool developed for environmental testing of MEMS: the EMA (Environmental MEMS Analyzer) 3D. Based on white light profilometry coupled with an environmental chamber, it permits large temperature scale and different pressure testing. This system has been used to characterize the environmental behavior of two types of RF MEMS, from −20 to 200°C.

Copyright © 2006 by ASME



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