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Design and Fabrication of Non-Powered MEMS Trajectory Sensors

[+] Author Affiliations
C.-M. Tassetti, J. Haussy, A. Tissot

Commissariat à l’Energie Atomique (CEA), Bruyères-le-Châtel, France

J.-L. Leray

Commissariat à l’Energie Atomique (CEA), Paris, France

O. Français

Conservatoire National des Arts et Métiers (CNAM), Paris, France

L. Rousseau

Ecole Supérieure d’Ingénieurs en Electronique et Electrotechnique (ESIEE), Noisy-le-Grand, France

Paper No. CANEUS2006-11053, pp. 219-224; 6 pages
doi:10.1115/CANEUS2006-11053
From:
  • CANEUS 2006: MNT for Aerospace Applications
  • CANEUS2006: MNT for Aerospace Applications
  • Toulouse, France, August 27–September 1, 2006
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4254-1 | eISBN: 0-7918-3787-4
  • Copyright © 2006 by ASME

abstract

Non-powered MEMS trajectory sensors based on a mass-spring-damped system have been designed and fabricated. The damping coefficient is provided by the displacement of a micro-piston in a chamber filled with a fluid.

Copyright © 2006 by ASME

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