Full Content is available to subscribers

Subscribe/Learn More  >

Silicon MEMS Pressure Sensors for Aerospace Applications

[+] Author Affiliations
Martin Nese, Bjo̸rn Erik Seeberg

Presens AS, Oslo, Norway

Paper No. CANEUS2006-11044, pp. 195-198; 4 pages
  • CANEUS 2006: MNT for Aerospace Applications
  • CANEUS2006: MNT for Aerospace Applications
  • Toulouse, France, August 27–September 1, 2006
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4254-1 | eISBN: 0-7918-3787-4
  • Copyright © 2006 by ASME


A novel piezoresistive silicon MEMS pressure sensor has been developed for full-scale measurement from 10 bar to > 1000 bar for high-precision oil & gas, aerospace and space applications. The silicon element has a tubular design with an externally stable resistor bridge to detect the pressure-induced stress. The fabrication process is by silicon planar technology and MEMS processes, such as silicon fusion bonding and electrochemical etching. The concept is favorable in rough field applications due to several key properties from small dimensions and deflections, high material rigidity, symmetry, a large output signal, fast pressure and temperature response and low acceleration sensitivity. The overload capability is several times the full-scale, since pressure mainly generates compressive stress. Long-term and hysteresis effects are minimized by eliminating the package-induced stress due to a relatively large distance from the die attach to the sensitive region. Total accuracy for a pressure range 700 bar and a wide temperature range −7 to 135°C is better than 0.01%FS. Typical hysteresis and repeatability is ± 10 ppm.

Copyright © 2006 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In