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Design and Microfabrication of Terahertz Magnetic Metamaterials

[+] Author Affiliations
Ta-Jen Yen, Nicholas Fang, Xiang Zhang

University of California at Los Angeles, Los Angeles, CA

Paper No. IMECE2003-41475, pp. 37-40; 4 pages
  • ASME 2003 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Washington, DC, USA, November 15–21, 2003
  • Conference Sponsors: Microelectromechanical Devices Division
  • ISBN: 0-7918-3721-1 | eISBN: 0-7918-4663-6, 0-7918-4664-4, 0-7918-4665-2
  • Copyright © 2003 by ASME


In this work, we introduce the simulation design and microfabrication of a class of magnetic metamaterials with critical dimension of 2–6 microns and lattice constant of 30–50 microns. These metamaterials will exhibit magnetic response at 0.5–2THz. To optimize the design variables, we conducted a series of Taguchi experiments and a quasi-linear relationship of resonant frequency is established upon each design parameter. We are currently characterizing the first generation of the fabricated magnetic metamaterials using Fourier Transformed Infrared spectroscopy.

Copyright © 2003 by ASME



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