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Development of a Laser Based Dual-Axial Five-Degrees-of-Freedom Measurement System for an X-Y Stage

[+] Author Affiliations
Wen-Yuh Jywe, Chien Hung Liu, Jing-Chung Shen, Wen-Hsiang Hsieh

National Formosa University, Yunlin, Taiwan, R.O.C.

Yun-Feng Teng

National Chung Cheng University, Taiwan, R.O.C.

Chun-Jen Chen

National Cheng Kung University, Tainan, Taiwan, R.O.C.

Yung-Cheng Wang

National Yunlin University of Science and Technology, Yunlin, Taiwan, R.O.C.

Paper No. ESDA2006-95572, pp. 997-1002; 6 pages
doi:10.1115/ESDA2006-95572
From:
  • ASME 8th Biennial Conference on Engineering Systems Design and Analysis
  • Volume 2: Automotive Systems, Bioengineering and Biomedical Technology, Fluids Engineering, Maintenance Engineering and Non-Destructive Evaluation, and Nanotechnology
  • Torino, Italy, July 4–7, 2006
  • ISBN: 0-7918-4249-5 | eISBN: 0-7918-3779-3
  • Copyright © 2006 by ASME

abstract

This paper presents a new precision multi-DOF measurement system which has been developed and implemented for the simultaneous measurement of 5DOF motion errors (two linear positions, as well as pitch, roll and yaw) of an X-Y stage. In this paper, the 3DOF laser interferometer was produced by designing the optical path from the one-degrees-of-freedom laser interferometer. The system employs two three-degree-of-freedom interferometers to detect two position errors and three angular errors of the X-Y stage. The experimental setups and measuring procedure and a systematic calculated method for the error verification are presented in the paper. The resolution of measuring the angular errors component is about 0.055 arcsec.

Copyright © 2006 by ASME

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