0

Full Content is available to subscribers

Subscribe/Learn More  >

A Numerical Procedure for Obtaining the Static and Pull-In Deflection and Voltage of Capacitive Microcantilever Beams

[+] Author Affiliations
Seyed Babak Ghaemi Oskouei, Aria Alasty

Sharif University of Technology, Tehran, Iran

Paper No. ESDA2006-95548, pp. 989-996; 8 pages
doi:10.1115/ESDA2006-95548
From:
  • ASME 8th Biennial Conference on Engineering Systems Design and Analysis
  • Volume 2: Automotive Systems, Bioengineering and Biomedical Technology, Fluids Engineering, Maintenance Engineering and Non-Destructive Evaluation, and Nanotechnology
  • Torino, Italy, July 4–7, 2006
  • ISBN: 0-7918-4249-5 | eISBN: 0-7918-3779-3
  • Copyright © 2006 by ASME

abstract

A numerical procedure is proposed for obtaining the static deflection, pull-in (PI) deflection and PI voltage of electrostatically excited capacitive microcantilever beams. The method is not time and memory consuming as Finite Element Analysis (FEA). Nonlinear ordinary differential equation of the static deflection of the beam is derived, w/wo considering the fringing field effects. The nondimensional parameters upon which PI voltage is dependent are then found. Thereafter, using the parameters and the numerical method, three closed form equations for pull-in voltage are developed. The results are in good agreement with others in literature.

Copyright © 2006 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In