Full Content is available to subscribers

Subscribe/Learn More  >

Estimation of the Damping in MEMS Inertial Sensors: Comparison Between Numerical and Experimental Results Both at High and Low Pressure Levels

[+] Author Affiliations
Francesco Braghin, Elisabetta Leo, Ferruccio Resta

Politecnico di Milano, Milano, Italy

Paper No. ESDA2006-95549, pp. 759-766; 8 pages
  • ASME 8th Biennial Conference on Engineering Systems Design and Analysis
  • Volume 2: Automotive Systems, Bioengineering and Biomedical Technology, Fluids Engineering, Maintenance Engineering and Non-Destructive Evaluation, and Nanotechnology
  • Torino, Italy, July 4–7, 2006
  • ISBN: 0-7918-4249-5 | eISBN: 0-7918-3779-3
  • Copyright © 2006 by ASME


Except for MEMS working in ultra high vacuum, the main cause of damping is the air surrounding the system. When the working pressure is equal to the atmospheric one (from now on called “high pressure”, i.e. 105Pa), the mean free path of an air molecule is much smaller than typical MEMS dimensions. Thus, air can be considered as a viscous fluid and two phenomena occur: flow damping and squeeze film damping. These two terms can be evaluated through a simplified Navies-Stocks equation. In vacuum (from now on called “low pressure”, i.e. 26Pa), the air cannot be considered as a viscous fluid any more since the free path of an air molecule is of the same order of magnitude of typical MEMS dimensions. Thus, the molecular fluid theory must be used to estimate the damping. To predict the damping of a MEMS device both at high and low pressure levels, a multi-physics code was used and the achieved numerical results were compared to experimental data measured on the same device.

Copyright © 2006 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In