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Rapid Measuring Method of Micro-Motion Based on Time-Averaged Microscopic Interferometry

[+] Author Affiliations
Tong Guo, Chunguang Hu, Jinping Chen, Xing Fu, Xiaotang Hu

Tianjin University, Tianjin, China

Paper No. MNC2007-21020, pp. 1567-1571; 5 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


An optical measurement system and method for out-of-plane motion testing of micro-structures is presented. Based on a Mirau type microscopic interferometer, the system adopts time-averaged interferometry to realize the measurement of the out-of-plane dynamic properties of movable micro-structures. For mapping the zero-order Bessel function modulating the contrast of two-beam interference fringes, a four-step phase-shift technique is applied. An experiment on a micro-resonator demonstrates that out-of-plane motion can be measured at any frequency with a lateral resolution in the micrometer range and a detection limit around 5nm.

Copyright © 2007 by ASME



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