Full Content is available to subscribers

Subscribe/Learn More  >

Study and Measurement of Micro-Scale Bonding Strength in Vertical Direction

[+] Author Affiliations
Dongning Liu, Dacheng Zhang

Peking University, Beijing, China

Paper No. MNC2007-21595, pp. 1547-1555; 9 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


A new way to evaluate the strength of micro-scale bonding is developed by using a silicon cantilever beam bonded on the substrate by a small anchor. The central concept is that the bonding area will be fractured when a certain vertical force is loaded on it, and this force can be used as a “standard”. This test is easy to be carried out. It also can be used in in-situ bonding quality monitoring in MEMS fabrication. Edge effect, the length of the bonding area partly determines the bonding strength, is found in micro-scale bonding. The coefficients of the edge effect, which determine the bonding strength at the interface of the bonding are, are calculated. Designers can use the equations and the coefficients to design the bonding areas according to the requirement of bonding strength for their devices or the appropriate test structures for the bonding quality in-situ monitoring.

Copyright © 2007 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In