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Study to Enhance the Micro-Level in USM

[+] Author Affiliations
Baoxian Jia, Wenfeng Bian

Harbin Institute of Technology-Weihai, Weihai, China

Wansheng Zhao, Zhenlong Wang

Harbin Institute of Technology, Harbin, China

Paper No. MNC2007-21592, pp. 1541-1545; 5 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


With the wide applications of the hard brittle materials in micro electromechanical system (MEMS), the high precision micromachining technology of hard brittle materials has become an important subject. In order to enhance the machining accuracy and the degree of the micro ultrasonic machining (USM), the key technologies in micro USM are discussed. They include high precision machine body, rotated tool, on-line tool preparation, applying vibration to the workpiece, choosing the parameters of micro tool and so on. The buckling dynamic stability of the micro tool is analyzed. It not only depends on the static pressure but also on the ultrasonic amplitude. The formula for calculating the critical length of the tool is given. It can solve the problem of the tool’s bend, breakage, and deteriorating the hole shape accuracy in machining process caused by the improper choice of tool length, static pressure and ultrasonic amplitude. The experiment is carried out on the micro USM system, and the machined samples are presented.

Copyright © 2007 by ASME



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