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Study on the Micro Milling Process of the Inertial MEMS Components

[+] Author Affiliations
Bo Wang, Yan Zhao, Ying Chun Liang

Harbin Institute of Technology, Harbin, China

Paper No. MNC2007-21469, pp. 1497-1501; 5 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


Micro milling technology is used in the manufacturing of the inertial MEMS components with 3D micro structures. Firstly, a 3-axis micro milling machine was developed. The positioning accuracy of all the 3 axis is better than 0.25 μm and the highest spindle speed is 160,000RPM. Then, using this machine, the optimal cutting parameters are studied and the components are successfully manufactured. Finally, to ensure the stable performance of the components, laser cofocus microscope and a new method called micro-bridge method is introduced to estimate the roughness, elastic modulus and residual stress of the micro milled thin-walled structures in the inertial MEMS components and this is a good try to evaluate the surface quality produced by micro milled method.

Copyright © 2007 by ASME



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