Full Content is available to subscribers

Subscribe/Learn More  >

Study on Control Method of AFM Probe Based Nanomanipulation

[+] Author Affiliations
Lina Hao

Northeastern University, Shenyang, Liaoning, China

Jiangbo Zhang, Ning Xi

Michigan State University, East Lansing, MI

Paper No. MNC2007-21468, pp. 1489-1495; 7 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


Atomic Force Microscope (AFM) based nanomanipulation has been extensively investigated for many years. However, efficiency and accuracy of AFM based nanomanipulation is still a major issue due to the nonlinearities and uncertainties in nanomanipulation. The compensation of drift, creep, hysteresis and some other nonlinearities generating large spatial uncertainties has been studied by some research groups. The compensation of these uncertainties does help to improve the accuracy of nanomanipulation to a certain extent. However, the deformation of the cantilever is one of the major nonlinearities affecting the accuracy during manipulations. It is difficult to control the tip position precisely due to the uncertainty of the deformation. A promising way to solve this problem is to actively change the nominal rigidity of the cantilever. This paper focused on the accurate control of active AFM probe based on survey of existing way to eliminate the deformation. The experimental results have verified the theoretical model and demonstrated that the precise position control.

Copyright © 2007 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In