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Research on the Fabrication Time and Surface Quality of the Plane Model in the Two-Photon Three Dimension Microfabrication

[+] Author Affiliations
Peng Wei, Yu Zhu, Guanghong Duan

Tsinghua University, Beijing, China

Paper No. MNC2007-21259, pp. 1363-1368; 6 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


The comprehensive evaluation index was introduced to reduce the fabrication time and improve the surface quality of the two-photon three dimension microfabrication. And the relation between the exposure time and the overlap rate with the fabrication time and the surface quality was described in detail. The objective function based on the evaluation index was given. And the Genetic Algorithm was applied in searching the optimal solution of the objective function. Simulation results indicate that the method is useful to some extent.

Copyright © 2007 by ASME



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