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Micro Ablation of Optical Fibers Using Vacuum Ultraviolet Laser

[+] Author Affiliations
Yutang Dai, Weilai Li, Desheng Jiang

Wuhan University of Technology, Wuhan, Hubei, China

Paper No. MNC2007-21238, pp. 1353-1356; 4 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


157nm vacuum ultraviolet laser was considered as one of promising tools for next-generation lithography or precision micro-ablation. In this study, a multi-functional micro-ablation system with 157 nm vacuum ultraviolet laser was conducted. Some laser ablation experiments were performed for silica glasses and optical fibers. For the silica glasses, the average ablation rate of the 157nm laser could reach to 4μm/s. The material removal is one-photon-absorption process in the case of 157nm VUV laser. Experiments also show that, the 157nm laser ablation has wonderful possibilities for fabricating precision 3D micro-structures in the optical fibers.

Copyright © 2007 by ASME



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