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Functionalization of Microcantilever Sensors Using Inkjet Drop-on-Demand

[+] Author Affiliations
Nicholas J. Post, George T.-C. Chiu

Purdue University, West Lafayette, IN

Paper No. MNC2007-21216, pp. 1345-1351; 7 pages
doi:10.1115/MNC2007-21216
From:
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME

abstract

Chemical and biochemical sensors based on microcantilever arrays have emerged as new platforms for sensitive analyte detection. A critical step in the manufacture of microcantilever sensors is the functionalization process, where a chemically selective layer is deposited onto the surface of the cantilever. Inkjet drop-on-demand has been recognized as a befitting technology for depositing these layers because of the ability to repeatedly deposit precise amounts of fluid. This paper presents experimental results of applying inkjet printing to functionalize microcantilever sensors. Methods for tuning inkjet drive pulse are presented along with characterization of drop displacement. Strategies for printing the functional layer are presented and system capabilities are demonstrated by depositing black ink onto cantilevers.

Copyright © 2007 by ASME
Topics: Sensors , Drops

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