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Penetrating Process Analysis of AFM Diamond Tip

[+] Author Affiliations
Z. J. Hu, Y. D. Yan, Y. H. Zhang, T. Sun, S. Dong

Harbin Institute of Technology, Harbin, China

Paper No. MNC2007-21109, pp. 1231-1235; 5 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


A mechanical micro-scratching system based on Atomic Force Microscope (AFM) and three-dimensional high precision stage was built up. In the machining process with diamond tip, the process of depth controlling was determined by the relation between the loading movement of the stage and the tip penetration depth. By theoretical analysis of loading process with diamond tip, a mathematical model correlated loading movement and the penetration depth was founded, and the loading efficiency formula of elastic tip was also acquired. Verified by experiments, such equations reflected the indenting process of the system and provided theoretical basis on optimizing the penetration depth control arithmetic.

Copyright © 2007 by ASME



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