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Research on Machining System Design and Machining Method of Micro Optical Aspheric Surface

[+] Author Affiliations
Hao Huang, Yinbiao Guo

Xiamen University, Xiamen, China

Paper No. MNC2007-21062, pp. 1175-1179; 5 pages
doi:10.1115/MNC2007-21062
From:
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME

abstract

At present high precision aspheric surface has been widely used in high performance optical system, but at current technical condition, the machining of high precision aspheric surface is still difficult. According to the requirement of high precision micro aspheric surface machining, three machining method of spherical wheel machining in micro axisymmetric aspheric has been put forward. And a high precision manufacturing and measurement system based on the machining method mentioned above has been designed and realized. It adopts the technology of tool uniform wear and error compensation, can be chose different machining method, and reach to the requirement of high precision micro aspheric surface machining.

Copyright © 2007 by ASME
Topics: Machining , Design

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