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Ink-Jet as a MEMS Manufacturing Tool

[+] Author Affiliations
David Wallace, Donald Hayes, Ting Chen, Virang Shah, Delia Radulescu, Patrick Cooley

MicroFab Technologies, Inc., Plano, TX

Kurt Wachtler

Texas Instruments, Dallas, TX

Arunkumar Nallani

Intel Corporation, Chandler, AZ

Paper No. MNC2007-21051, pp. 1161-1168; 8 pages
doi:10.1115/MNC2007-21051
From:
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME

abstract

In the last decade, ink-jet has come to be viewed as a precision microdispensing tool, in addition to its huge success in color printing. Today, this tool is being used in a wide range of applications, including electrical & optical interconnects, sensors, medical diagnostics, drug delivery, MEMS packaging, and nanostructure materials deposition. Ink-jet microdispensing is data-driven, non-contact, and is capable of precise deposition of picoliter volumes at high rates, even onto non-planar surfaces. Being data-driven, ink-jet dispensing is highly flexible and can be readily automated into manufacturing lines. This paper will illustrate a few of the applications of ink-jet technology that are either MEMS manufacturing applications, or relevant to potential MEMS manufacturing applications.

Copyright © 2007 by ASME

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