0

Full Content is available to subscribers

Subscribe/Learn More  >

Nanofluidic Channel Fabrication and Characterization by Micromachining

[+] Author Affiliations
Wan-Sik Kim, Junghoon Lee, Rodney S. Ruoff

Northwestern University, Evanston, IL

Paper No. IMECE2003-41588, pp. 841-846; 6 pages
doi:10.1115/IMECE2003-41588
From:
  • ASME 2003 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems and Photonic Design, and Nanotechnology
  • Washington, DC, USA, November 15–21, 2003
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-3714-9 | eISBN: 0-7918-4663-6, 0-7918-4664-4, 0-7918-4665-2
  • Copyright © 2003 by ASME

abstract

The well-established microfabrication techniques of complementary metallic oxide silicon (CMOS) selective oxidation and wafer-wafer fusion bonding were used to fabricate sub-micrometer silicon fluidic channels as small as 30 nm between extremely thin SiO2 top and bottom layers of 30 nm thicknesses. Trenches a few tens of nanometer deep were patterned in 10-cm diameter Si wafers by selective oxidation and their depth measured by atomic force microscopy (AFM); the AFM measured depths showed that the trench depth could be controlled to nanometer resolution. The resolution of the photolithography employed determined the trench width resolution. Nanochannels were formed with direct wafer-wafer fusion bonding. Channels of 30-nm depth or greater between the bonded wafer pair were nondestructively detected by a simple infrared (IR) image system; channels less than this depth collapsed for the overall channel geometry employed. Thus the nanofluidic structures survived the pressure and high temperature anneal of wafer bonding. Experimental results agree well with a theoretical prediction for which depths nanochannels would collapse.

Copyright © 2003 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In