Full Content is available to subscribers

Subscribe/Learn More  >

Manufacturing Structures in Nanometer Scale by Nanomanipulation

[+] Author Affiliations
Y. J. Zhang, Y. Z. Hu, H. Wang, P. Li

Tsinghua University, Beijing, P. R. China

L. Huang

Peking University, Beijing, P. R. China

Paper No. IMECE2003-41262, pp. 831-834; 4 pages
  • ASME 2003 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems and Photonic Design, and Nanotechnology
  • Washington, DC, USA, November 15–21, 2003
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-3714-9 | eISBN: 0-7918-4663-6, 0-7918-4664-4, 0-7918-4665-2
  • Copyright © 2003 by ASME


Nanomanipulation based on atomic force microscope is one of the key technologies for nanomanufacturing. It plays important role in practical fabrication of nanodevices. In this paper, nanomanipulation method is used to build a structure in nanometer scale. A basic pattern made up of single-wall carbon nanotube on silicon substrate was successfully obtained by sophisticated manipulations, and thus provides an effective way to make more complicated nanostructures. In the meantime, experiments results also show a promising prospect to build future nanodevices step by step using this technique. Carbon nanotubes are selected as the raw materials for nanofabrication due to their excellent mechanical and electrical properties, which are the most suitable for the application in building nano-electromechanical systems (NEMS). In addition, the major failure modes of nanomanipulation experiments were also analyzed by FED-SEM observation. The main factors affecting the final manipulation results, wear and pollution of tips, and their corresponding relations between tips and experiment results were analyzed. Furthermore, the preventive measurements were proposed in order to get better results. A new method for measuring manipulating forces was explored in the experiments based on a commercial AFM (Atom Force Microscope). Lateral forces while manipulating and cutting a single-walled carbon nanotube was successfully measured that providing valuable information for quantitative research on nanomechanics.

Copyright © 2003 by ASME
Topics: Manufacturing



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In