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A New Friction Estimation Approach for Precision Positioner

[+] Author Affiliations
Wen Wang, Zichen Chen

Zhejiang University, Hangzhou, China

Xinxin Li

Zhejiang University, Hangzhou, China; Guangxi University for Nationalities, Nanning, China

Paper No. MNC2007-21535, pp. 715-718; 4 pages
doi:10.1115/MNC2007-21535
From:
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME

abstract

Precision positioner has been significantly developed as the rapid growth of MEMS and IC industries. As for short-stroke position, the loss of friction can be avoided by using flexible hinges. Long-stroke postioner, however, in which moved-to-be mass always stands on the guide-way part, a main source of friction, makes friction unavoidable. Friction estimation is based on certain filters, such as Extended Kalman filter (EKF). However, estimation accuracy of Kalman filter, especially at low-velocity movement, is not very well. To solve this problem, the paper proposes an estimation method based on DD2 to make an accurate estimation. And the result shows this method is promising in real-time friction estimation. After background introduction, in section 2, the relation of EKF and Taylor series and EKF implementation are reviewed and its limitations are noted as well. A briefly introduction to DD2 is given in Section 3 and friction estimation case comparing the simulation results of DD2 estimation with that of EKF described in Section 4, respectively. At last, conclusions are summarized.

Copyright © 2007 by ASME
Topics: Friction

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