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An Instrument for Measuring Mechanical Properties of MEMS Materials by Nanoindentation and Micro-Beam-Bending

[+] Author Affiliations
Hairong Wang

Xi’an Jiaotong University, Xi’an, China; Chinese University of Hong Kong, Shatin, Hong Kong

Zexiang Zhao

Zhongyuan Institute of Technology, Zhengzhou, China

Zhuangde Jiang

Xi’an Jiaotong University, Xi’an, China

R. Du

Chinese University of Hong Kong, Shatin, Hong Kong

Paper No. MNC2007-21421, pp. 693-698; 6 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


This paper presents an instrument for measuring the mechanical properties of MEMS materials by both nanoindentation and micro-beam-bending tests. The nanoindentation test requires high resolution within a very small displacement range, whereas the micro-beam-bending test needs relatively large displacement range but lower resolution. Though, for both tests, loading with small increment is necessary. In order to satisfy different requirements and yet save cost, a two-stage system driven by a PZT actuator in the first stage and by a DC-Mike Linear motor in the second stage is designed and built. The instrument achieves a displacement resolution better than 1 nm within a range of 50 microns in the first stage and the maximum output displacement is over 1 mm in the second stage. The measurement accuracy is validated through experiments.

Copyright © 2007 by ASME



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