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MOS Capacitor Micro Sensor Array for Hydrogen Gas Measurement

[+] Author Affiliations
Cheng Hu, Xidong Qu

National Research Council Canada, Vancouver, BC, Canada

Q. M. Jonathan Wu

University of Windsor, Windsor, ON, Canada

Glenn Chapman

Simon Fraser University, Burnaby, BC, Canada

Paper No. MNC2007-21602, pp. 613-614; 2 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


Palladium-MOS hydrogen sensors have wide applications in the industries. This paper presents a novel design and development of a hydrogen sensor and sensor array based on MOS capacitor structure. An empirical model for sensors’ response to hydrogen concentrations is established and validated. Experimental results demonstrate that the sensor is highly sensitive to hydrogen gas, is capable of not only hydrogen leaks detection, but leaks location, and gas distribution monitoring.

Copyright © 2007 by ASME



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