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A Feasibility Study on Micro Silicon Cantilever Beam for High Isolation RF MEMS Switch

[+] Author Affiliations
Lingling Lin, Guoqing Hu, Wenyan Liu

Xiamen University, Xiamen, China

Feiyan Chen

Guangdong University of Technology, Guangzhou, China; Jimei University, Xiamen, China

Baihai Wu

Jimei University, Xiamen, China

Paper No. MNC2007-21460, pp. 543-549; 7 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


This paper presents a novel electrostatically actuated microelectromechanical switch. The structure of cantilever beam with electrodes sandwiched between Si and SiO2 layers has been established. Placing the pull-down electrodes outside the switching contact, the actuation voltage can be reduced while keeping high contact force and restoration force. The top and bottom dielectric materials separated two conducting electrodes when actuated. Thus, the reliability and the performance of the switch have been greatly improved. The charts of the deflection of the cantilever beam with respect to the voltage have been simulated with the MATLAB computer programming language.

Copyright © 2007 by ASME



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