Full Content is available to subscribers

Subscribe/Learn More  >

Design and Simulation of Novel MEMS Optical Acceleration Sensor

[+] Author Affiliations
Shuhai Jia, Weijun Kong, Jia Yang

Xi’an Jiaotong University, Xi’an, Shaanxi, China

Yigui Li

Shanghai Jiaotong University, Shanghai, China

Paper No. MNC2007-21414, pp. 535-538; 4 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


A novel MEMS optical acceleration sensor based on a Fresnel diffraction micro-lens is designed in this paper, which is suitable to be used in the fly-by-light system of aviation. The principle of sensor is described. The dynamic performance design of sensor is presented. The constant of silicon micro spring and natural frequency is calculated by using the numerical simulator (ANSYS 8.0) of finite element method. Because the design of the sensor integrates a Fresnel diffraction lens, the optical throughput is high, which brings the advantage of higher signal-to-noise ratio with respect to photon noise. The design of the sensor is well suitable for mass production with normal process of MEMS a low cost. The proof-of-Principle fabrication and experiments show that the principle of this new MEMS optical acceleration sensor is correct.

Copyright © 2007 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In